Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 36(3); 2003
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2003;36(3):234-241. Published online: Nov, 30, -0001

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Growth of SiC Nanorods Using Fe and Hexamethyldisilabutane

  • Rho Dae-Ho;Kim Jae-Soo;Byun Dong-Jin;Yang Jae-Woong;Kim Na-Ri;
    Korea University, Department of Materials Science and Engineering;Korea Institute of Science and Technology, Metal Processing Research Center;Korea University, Department of Materials Science and Engineering;Daijin University, Department of Advance Materi
Abstract

SiC nanorod was synthesized directly on Si substrate using hexamethyldisilabutane and Fe catalyst with (111) direction. Fe acted a liquid catalyst at growth condition. Grown SiC nanorod has about 30nm diameter and $5{mu}m$ length. SiC nanorod g

Keywords SiC;Nanorod;VLS;HMDS;CVD;Fe;