Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 36(4); 2003
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2003;36(4):296-300. Published online: Nov, 30, -0001

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Diamond-Like Carbon Films Deposited by Pulsed Magnetron Sputtering System with Rotating Cathode

  • Chun, Hui-Gon;You, Yong-Zoo;Nikolay S. Sochugov;Sergey V. Rabotkin;
    School of Materials Science and Engineering, ReMM, University of Ulsan;School of Materials Science and Engineering, ReMM, University of Ulsan;Inst. of High Current Electronics, Siberian Div, of RAS;Inst. of High Current Electronics, Siberian Div, of RAS;
Abstract

Extended cylindrical magnetron sputtering system with rotating 600-mm long and 90-mm diameter graphite cathode and pulsed power supply voltage generator were developed and fabricated. Time-dependent Langmuir probe characteristics as well as carbon films t

Keywords Pulsed magnetron sputtering;Probe measurements;DLC films deposition;