Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 37(1); 2004
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2004;37(1):1-4. Published online: Nov, 30, -0001

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Influence of Deposition Conditions on the Adhesion of Sputter-deposited MoS$_2$-Ti Films

  • Kim, Sun-Kyu;Yongliang Li;
    Traditional Technology Innovation Research Laboratory School of Material Science and Engineering, University of Ulsan;Traditional Technology Innovation Research Laboratory School of Material Science and Engineering, University of Ulsan;
Abstract

MoS$_2$-Ti films were deposited on SKD-11 tool steel substrate by a D.C. magnetron sputtering system. The influence of deposition parameters on the adhesion of the films was investigated by the scratch test. Crosssection morphology was evaluate

Keywords MoS$_2$-Ti film;D.C. Magnetron sputtering;Adhesion;Hardness;