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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 37(3); 2004
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2004;37(3):169-174. Published online: Nov, 30, -0001
A Study of MgO Thin Film′s Properties Fabricated by ICP Magnetron Sputtering Method
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군산대학교 공과대학 재료화학공학부;군산대학교 공과대학 재료화학공학부;
Abstract
MgO thin films were reactively deposited using an internal inductively coupled plasma assisted sputtering method varying reactive gas ratio to get stoichiometric film composition, and bipolar dc substrate bias to suppress micro arcs. The minimum frequency
Keywords Plasma display panel;MgO;Inductively coupled plasma;Sputtering;