Oct, 31, 2024

Vol.57 No.5

Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 37(4); 2004
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2004;37(4):220-225. Published online: Nov, 30, -0001

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QMF Ion Beam System Development for Oxide Etching Mechanism Study

  • 주정훈;
    군산대학교 재료공학과;
Abstract

A new ion beam extraction system is designed using a simple ion mass filter and a micro mass balance and a QMS based detecting system. A quadrupole Mass Filter is used for selective ion beam formation from inductively coupled high density plasma sources w

Keywords QMS;Inductively coupled plasma;Ion beam;Etch;