![](/html/templates/default/images/main/pic/journal01.png)
- Past Issues
- e-Submission
-
2021 Impact Factor 1.766
5-Year Impact Factor 1.674
Editorial Office
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
2021 Impact Factor 1.766
5-Year Impact Factor 1.674
KISE Journal of Korean Institute of Surface Engineering 2004;37(4):220-225. Published online: Nov, 30, -0001
A new ion beam extraction system is designed using a simple ion mass filter and a micro mass balance and a QMS based detecting system. A quadrupole Mass Filter is used for selective ion beam formation from inductively coupled high density plasma sources w
Keywords QMS;Inductively coupled plasma;Ion beam;Etch;