Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 37(6); 2004
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2004;37(6):307-312. Published online: Nov, 30, -0001

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Studies on Structure and Optical Characteristics of TiO-N Thin Film Manufactured by DC Reactive Magnetron Sputtering Method

  • Park Jang Sick;Park Sang Won;Kim Tae Woo;Kim Sung Kuk;Ahn Won Sool;
    미래엔지니어링;계명대학교 환경공학부;미래엔지니어링;계명대학교 환경공학부;계명대학교 공과대학;
Abstract

Extensive efforts have been made in an attempt to utilize photocatalytic properties of $TiO_2$ in visible range. $TiO_2$ and TiO-N thin films were made by the DC reactive magnetron sputtering method at $300^{circ}C$. Vario

Keywords Photocatalysis;TiO$_2$;TiO-N;Hysteresis;Discharge voltage characteristics;Optical absorption spectrum;