Oct, 31, 2024

Vol.57 No.5

Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 38(2); 2005
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2005;38(2):55-59. Published online: Nov, 30, -0001

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Optical and Electrical Properties of ITO/Ni/ITO Thin Films

  • Kim So-Ra;Seo Jung-Eun;Kim Sang-Ho;Lee In-Seon;Kim Dong-Won;
    Korea University of Technology and Education, Advanced Materials Engineering;Korea University of Technology and Education, Advanced Materials Engineering;Korea University of Technology and Education, Advanced Materials Engineering;Korea University of Tech
Abstract

ITO/Ni/ITO thin films were deposited on the PET by RF magnetron sputtering. Dependance of the process parameters such as deposition pressure, positions of Ni layer, on the transmittance, reflectance and sheet resistance of ITO/Ni/ITO film were investigate

Keywords indium Tin Oxide[ITO];RF Sputtering;Ni;Transmittance;Sheet resistance;