Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 38(2); 2005
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2005;38(2):69-72. Published online: Nov, 30, -0001

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Influence of Deposition Pressure on Optical and Electrical Properties of ITO/Al/ITO Thin Films on PET by RF Magnetron Sputtering

  • Seo Jung-Eun;Kim Sang-Ho;Lee In-Seon;Kim Dong-Won;
    Korea University of Technology and Education, Advanced Materials Engineerin;Korea University of Technology and Education, Advanced Materials Engineerin;Korea University of Technology and Education, Advanced Materials Engineerin;Kyonggi University;
Abstract

ITO-Al-ITO multi-layers were deposited at room temperature by RF magnetron sputtering on polyethylene terephthalate (PET). The films were deposited at various pressures of $8 imes10^{-4},;1 imes10^{-3},;4 imes10^{-3},;8 imes10^{-3};and;1 imes10^{-2}$

Keywords ITO;Al;PET;RF magnetron sputtering;Optical transmission;Sheet resistance;