Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 38(2); 2005
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2005;38(2):73-78. Published online: Nov, 30, -0001

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A Real-Time Diagnostic Study of MgO Thin Film Deposition Process by ICP Magnetron Sputtering Method

  • Joo Junghoon;
    Kunsan National University, Department of Materials Science & Engineering;
Abstract

A real-time monitoring of ICP(inductively coupled plasma) assisted magnetron sputtering of MgO was carried out using a QMS(quadrupole mass spectrometer), an OES(optical emission spectrometer), and a digital oscilloscope with a high voltage probe and a cur

Keywords Plasma display panel;MgO;Inductively coupled plasma;Sputtering;