Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 38(3); 2005
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2005;38(3):95-99. Published online: Nov, 30, -0001

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Microstructure of Ti-Cr-Si-N Coatings Deposited by a Hybrid System of Arc ion Plating and Sputtering Techniques

  • Kang Dong Shik;Jeon Jin Woo;Song Pung Keun;Kim Kwang Ho;
    School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineerin
Abstract

Quaternary Ti-Cr-Si-N coatings were synthesized onto steel substrates (SKD 11) using a hybrid method of arc ion plating (AIP) and sputtering techniques. For the Syntheses of Ti-Cr-Si-N coatings, the Ti-Cr-N coating process was performed substantially by a

Keywords Ti-Cr-Si-N;Microstructure;Sputtering;AIP;