Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 38(3); 2005
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2005;38(3):106-111. Published online: Nov, 30, -0001

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The Effect of Boron Content and Deposition Temperature on the Microstructure and Mechanical Property of Ti-B-C Coating Prepared by Plasma-enhanced Chemical Vapor Deposition

  • Ok, Jung-Tae;Song, Pung-Keun;Kim, Kwang-Ho;
    School of Material Science and Engineering, Pusan National University;School of Material Science and Engineering, Pusan National University;School of Material Science and Engineering, Pusan National University;
Abstract

Ternary Ti-B-C coatings were synthesized on WC-Co and Si wafers substrates by a PECVD technique using a gaseous mixture of $TiCl_4,;BCl_3,;CH_4,;Ar,;and; H_2$. The effects of deposition variables such as substrate temperature, gas ratio, $

Keywords PECVD;Ti-B-C coatings;Nanocomposite;Microstructure;Depositon temperature;