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KISE Journal of Korean Institute of Surface Engineering 2005;38(4):137-143. Published online: Nov, 30, -0001
CrSiN coatings of stepwise changing Si concentration were deposited on stainless steel by closed field unbalanced magnetron sputtering (CFUBM) system. Microstructure of the films due to the Si concentration is measured by XRD. The corrosion behavior of Cr
Keywords EIS;CrN;CrSiN;Si;