Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 38(4); 2005
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2005;38(4):150-155. Published online: Nov, 30, -0001

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Structure and Properties of Sputtered Indium Tin Oxide Thin Film

  • Jung Y.H.;Lee E.S.;Munir B.;Wibowo R.A.;Kim K.H.;
    Yeungnam University, School of Materials Science and Engineering;Yeungnam University, School of Materials Science and Engineering;Yeungnam University, School of Materials Science and Engineering;Yeungnam University, School of Materials Science and Enginee
Abstract

Highly conductive and transparent in the visible region tin-doped indium oxide(ITO) thin films were deposited on Corning glass by r.f sputtering. To achieve high transmittance and low resistivity, we examined various parameters such as r.f power and depos

Keywords Trgnsparent conducting oxide;ITO;Sputtering;R.F power;Deposition time;