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KISE Journal of Korean Institute of Surface Engineering 2005;38(4):156-162. Published online: Nov, 30, -0001
Nickel-iron nanocrystalline alloys with different compositions and grain sizes were fabricated by electro-plating for MEMS devices. The iron content of the deposits was changed by varying the nickel/iron ion ratio in the electrolyte. X-ray diffraction (XR
Keywords Electroplating;nickel-iron alloy;Nanocrystalline;Grain size;Internal stress;Hardness;Roughness;