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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 38(5); 2005
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2005;38(5):183-187. Published online: Nov, 30, -0001
Structure and Mechanical Characteristics of ZrCrAIN Nanocomposite Thin Films by CFUBMS
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Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology;Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology;Departmen
Abstract
The quaternary ZrCrAIN nanocomposite thin films are synthesized by Closed-Field Unbalanced Magnetron Sputtering (CFUBMS). Microstructure and mechanical properties of ZrCrAIN nanocomposite thin films are studied. Grain refinement of ZrCrAIN nanocomposite t
Keywords ZrCrAIN;Nanocomposite;CFUBMS;