Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 38(5); 2005
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2005;38(5):188-192. Published online: Nov, 30, -0001

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Preparation and Characterization of IZO Thin Films grown by DC Magnetron Sputtering

  • Park Chang-Ha;Lee Hak-Jun;Kim Hyeon-Boum;Kim Dong-Ho;Lee Gun-Hwan;
    Korea Institute of Machinery and Materials, Surface Technology Research Center;Korea Institute of Machinery and Materials, Surface Technology Research Center;Korea Institute of Machinery and Materials, Surface Technology Research Center;Korea Institute of
Abstract

Indium zinc oxide (IZO) thin films were deposited on glass substrate by dc magnetron sputtering. The effects of oxygen flow rate and deposition temperature on electrical and optical properties of the films were investigated. With addition of small amount

Keywords indium zinc oxide;Transparent conductive oxide;Sputtering;Electrical transport properties;Transmittance;