Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 38(5); 2005
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2005;38(5):193-197. Published online: Nov, 30, -0001

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Room-Temperature Deposition of ZnO Thin Film by Pulsed Vacuum Arc and Effect of Oxygen Gas Ratio on Its Electrical Properties

  • Shin Min-Geun;Byon Eungsun;Lee Sunghun;Kim Do-Geun;Jeon Sang-Jo;Koo Bon Heun;
    Changwon National University;Surface Technology Research Center, Korea Institute of Machinery and Materials;Surface Technology Research Center, Korea Institute of Machinery and Materials;Surface Technology Research Center, Korea Institute of Machinery and
Abstract

Highly c-axis oriented Zinc oxide (ZnO) films were successfully deposited at room temperature by oxygen ion-assisted pulsed filtered vacuum arc. The effect of oxygen gas ratio ($O_{2}/O_{2}+Ar$ on the preferred orientation, surface morphology a

Keywords ZnO film;Pulsed vacuum arc;Oxygen gas ratio;Electrical property;Rllm-temperature deposition;