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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 38(6); 2005
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2005;38(6):207-211. Published online: Nov, 30, -0001
Studies on the Development of TiAIN/CrN Multi-layered Thin Films by Unbalanced Magnetron Sputtering Process
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Center for Advanced Plasma Surface Technology Materials Engineering Department, Hankuk Aviation University;Center for Advanced Plasma Surface Technology Materials Engineering Department, Hankuk Aviation University;Center for Advanced Plasma Surface Techno
Abstract
In this work a multi-layered nanostructured TiAIN/CrN superlattice coatings was synthesized using closed-field unbalanced magnetron sputtering method and the relationships between their superlattice period (1), micro-structure, hardness and elastic modulu
Keywords TiAIN/CrN thin films;Superlattice;Nono-indentotion test;Oxidation;High temperature wear test;Unbalanced mognetron sputterings;