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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 39(1); 2006
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2006;39(1):9-12. Published online: Nov, 30, -0001
Influence of Ag Thickness on Electrical and Optical Properties of AZO/Ag/AZO Multi-layer Thin Films by RF Magnetron Sputtering
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Materials Science and Engineering, Korea University of Technology and Education;School of Mechanical and Automotive Engineering, Kookmin University;Department of Materials Science and Engineering, Kyonggi University;Materials Science and Engineering, Kore
Abstract
Al-doped ZnO(AZO)/Ag/AZO multi-layer films deposited on PET substrate by RF magnetron sputtering have a much better electrical properties than Al-doped ZnO single-layer films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the optimum th
Keywords AZO;Ag;PET;RF magnetron sputtering;Optical transmission;Sheet resistance;