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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 39(2); 2006
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2006;39(2):64-69. Published online: Nov, 30, -0001
Nanolithography Using Haptic Interface in a Nanoscale Virtual Surface
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Div. of Mechanical and Automotive Engineering, Kongju National University;
Abstract
Nanoscale task such as nanolithography and nanoindenting is a challenging work that is beyond the capabilities of human sensing and precision. Since surface forces and intermolecular forces dominate over gravitational and other more intuitive forces of th
Keywords Haptic interfaces;Nonorobotics;Nonolithogrophy;Teleoperation control; Nonotechnology;