Dec, 31, 2024

Vol.57 No.6

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 39(2); 2006
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2006;39(2):70-75. Published online: Nov, 30, -0001

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Deposition of $(Ti,Cr)N-MoS_2$ Thin Films by D.C Magnetron Sputtering

  • Kim S.K.;Kim J.H.;
    School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of Ulsan;
Abstract

As technology advances, there is a demand for development of hard, solid lubricant coating. (Ti,Cr)N-$MoS_2$, films were deposited on SKD 11 tool steel substrate by co-deposition of $MoS_2$, with (Ti,Cr)N using a D.C. magnetron sputt

Keywords Soild Iubricant coating;(Ti,Cr)N-$MoS_2$ films;$MoS_2$;(Ti,Cr)N;D.C. magnetron sputtering;