Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 39(2); 2006
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2006;39(2):82-86. Published online: Nov, 30, -0001

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Cyclic on/off Modulation of $CH_4;and/or;O_2$ Flows for the Enhancement of the Diamond Film Characteristics

  • Kim Tae-Gyu;Kim Sung-Hoon;Yoon Su-Jong;
    Dept. of Nanosystem & Nanoprocessing, Pusan National University;Dept. of Electronic Materials, Silla University;Dept. of Nanomaterials Engineering, Pusan National University;
Abstract

Diamond films were deposited on 10.0$ imes$10.0$mm^2$ pretreated (100) Si substrate using $CH_4$, $H_2$ and $O_2$ source gases in a horizontal-type microwave plasma enhanced chemical vapor deposition

Keywords Diamond;Nucleation density;Quality;The simultaneous cyclic on/off modulation of $CH_4$ and $O_2$ flow;