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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 39(3); 2006
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2006;39(3):98-104. Published online: Nov, 30, -0001
Deposition of Al Doped ZnO Films Using ICP-assisted Sputtering on the Plastic Substrate
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School of Materials Science and Engineering, Seoul National University;School of Materials Science and Engineering, Seoul National University;School of Materials Science and Engineering, Seoul National University;
Abstract
Al-doped ZnO (AZO) films were deposited on the plastic substrate by inductively coupled plasma (ICP) assisted DC magnetron sputtering. The AZO films were produced by sputtering a metallic target (Zn/Al) in a mixture of argon and oxygen gases. AZO films wi
Keywords Al-doped ZnO (AZO);Inductively coupled plasma (ICP);Reactive sputtering;Target voltage control;Plastic substrate;