- Past Issues
- e-Submission
-
2021 Impact Factor 1.766
5-Year Impact Factor 1.674
Editorial Office
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 39(3); 2006
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2006;39(3):105-109. Published online: Nov, 30, -0001
The Effects of Negative Carbon Ion Beam Energy on the Properties of DLC Film
-
School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of U
Abstract
The effects of negative carbon ion beam energy on the bonding configuration, hardness and surface roughness of DLC film prepared by a direct metal ion beam deposition system were investigated. As the negative carbon ion beam energy increased from 25 to 15
Keywords Diamond-like carbon;Ion bombardment;Nanohardness;AFM;