Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 39(3); 2006
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2006;39(3):142-146. Published online: Nov, 30, -0001

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Development of Plasma Confinement by Applying Multi-Polar Magnetic Fields in an Internal Inductively Coupled Plasma System

  • Lim, Jong-Hyeuk;Kim, Kyong-Nam;Yeom, Geun-Young;
    Department of Materials Science and Engineering, Sungkyunkwan University;Department of Materials Science and Engineering, Sungkyunkwan University;Department of Materials Science and Engineering, Sungkyunkwan University;
Abstract

A novel internal-type linear inductive antenna, which we refer to as a double comb-type antenna, was developed for a large-area plasma source with substrate size of $880;mm{ imes}660;mm$ ($4^{th}$ generation glass size). In this stud

Keywords Plasma;Large area;Impedance;Display;