Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 39(4); 2006
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2006;39(4):153-159. Published online: Nov, 30, -0001

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A Study on the Characteristics of Nanodiamond Films with the Gas Flow Control

  • Kim, Tae-Gyu;Kim, Chang-Hoon;
    Dept. of Nano System & Process Engineering, Pusan National University;Korea Materials & Components Industry Agency;
Abstract

Nanodiamond films were deposited on Si substrate by introducing a time dependent on/off modulation of $CH_4;and;O_2$ flows in a vertical-type microwave plasma enhanced chemical vapor deposition system. Surface morphology and diamond quality of

Keywords Nanodiamond;On/off modulation time;Nano particle;Cluster;