Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 39(5); 2006
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2006;39(5):199-205. Published online: Nov, 30, -0001

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Processing and Characterization of RF Magnetron Sputtered TiN Films on AISI 420 Stainless Steel

  • Song, Seung-Woo;Choe, Han-Cheol;Kim, Young-Man;
    Department of Materials Science and Engineering, Chonnam National University;Department of Dental Materials, Chosun University;Department of Materials Science and Engineering, Chonnam National University;
Abstract

Titanium nitride (TiN) coatings were produced on AISI 420 stainless steel by DC magnetron sputtering of a Ti target changing the processing variables, such as the flow rate of $N_2/Ar$, substrate temperature and the existence of Ti interlayer b

Keywords Stoichiometry;Sputtering;Thin film;