Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 39(5); 2006
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2006;39(5):206-209. Published online: Nov, 30, -0001

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The effect of $Ar;+;H_2$ Plasma on the Low Temperature ITO Film Synthesized on Polymer

  • Moon, Chang-S.;Chung, Yun-M.;Lee, Ho-Y.;Kim, Yong-M.;Kim, Kab-S.;Gaillard, M.;Han, Jeon-G.;
    Center for Advanced Plasma Surface Technology, Sungkyunkwan University;Center for Advanced Plasma Surface Technology, Sungkyunkwan University;Center for Advanced Plasma Surface Technology, Sungkyunkwan University;Center for Advanced Plasma Surface Technol
Abstract

Indium tin oxide (ITO) films were synthesized on polymer (PES, polyethersulfone) at room temperature by pulsed DC magnetron sputtering. By the control of introducing hydrogen to argon atmosphere, the resistivity of ITO films was obtained at $5.27;{ i

Keywords ITO;Hydrogen;Low temperature;Pulsed magnetron sputtering;