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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 39(6); 2006
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2006;39(6):245-249. Published online: Nov, 30, -0001
Synthesis and Characteristics of New Quaternary Superhard Ti-Mo-Si-N Coatings
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Division of Materials Science and Engineering, Pusan National University;Division of Materials Science and Engineering, Pusan National University;Division of Materials Science and Engineering, Pusan National University;
Abstract
In this study, ternary Ti-Mo-N and new quaternary Ti-Mo-Si-N coatings were synthesized on steel substrates(AISI D2) and Si wafers by a hybrid coating system of arc ion plating (AIP) using Ti target and d.c. magnetron sputtering technique using Mo and Si t
Keywords Ti-Mo-Si-N;Hybrid cooling system;Microstructure;Mechanical properties;