Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 39(6); 2006
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2006;39(6):250-254. Published online: Nov, 30, -0001

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Effect of Hydrogen Partial Pressure Ratio on Electrical and Structural Properties of ZnO Thin Film

  • Lee, Sung-Hun;Shin, Min-Geun;Byon, Eung-Sun;Kim, Do-Geun;Jeon, Sang-Jo;Koo, Bon-Heun;
    Surface Engineering Research Center, Korea Institute of Machinery and Materials;Changwon National University;Surface Engineering Research Center, Korea Institute of Machinery and Materials;Surface Engineering Research Center, Korea Institute of Machinery
Abstract

Effect of hydrogen partial pressure ratio on the structural and electrical properties of highly c-axis oriented ZnO films deposited by oxygen ion-assisted pulsed filtered vacuum arc at a room temperature was investigated. The hydrogen partial pressure rat

Keywords Electrical property;Structure;ZnO thin film;Vacuum arc;Hydrogen effect;Low temperature deposition;