Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 39(6); 2006
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2006;39(6):263-267. Published online: Nov, 30, -0001

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Deposition of (Ti, Cr, Zr)N-$MoS_{2}$ Thin Films by D.C. Magnetron Sputtering

  • Kim, Sun-Kyu;Vinh, Pham-Van;
    School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of Ulsan;
Abstract

As technology advances, there is a demand for development of hard solid lubricant coating. (Ti, Cr, Zr)N-$MoS_2$ films were deposited on AISI H13 tool steel substrate by co-deposition of $MoS_2$ with (Ti, Cr, Zr)N using a D.C. magnet

Keywords Solid lubricant coating;(Ti, Cr, Zr)N-$MoS_2$ films;Magnetron sputtering;