Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(1); 2007
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2007;40(1):1-5. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.1.001

Microstructural and Mechanical Characteristics of TiZrAlN Nanocomposite Thin Films by CFUBMS

  • Kim, Youn-J.;Lee, Ho-Y.;Kim, Yong-M.;Kim, Kab-S.;Han, Jeon-G.;
    Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University;Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University;Cente
Abstract

Quaternary TiZrAlN nanocomposite thin films were synthesized by Closed-Field Unbalanced Magnetron Sputtering (CFUBMS), and their microstructure and mechanical characteristics were examined. The grain refinement of the TiZrAlN nanocomposite thin films was

Keywords TiZrAlN;Nanocomposite;CFUBMS;