Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(3); 2007
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2007;40(3):107-112. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.3.107

Characterization of AI-doped ZnO Films Deposited by DC Magnetron Sputtering

  • Park, Yi-Seop;Lee, Seung-Ho;Song, Pung-Keun;
    School of Materials Science and Engineering, Pusan National University;Korea Institute of Ceramic Engineering and Technology;School of Materials Science and Engineering, Pusan National University;
Abstract

Aluminum doped zinc oxide (AZO) films were deposited on non-alkali glass substrate by DC magnetron sputtering with 3 types of AZO targets (doped with 1.0 wt%, 2.0 wt%, 3.0 wt% $Al_2O_3$). Electrical, optical properties and microstructure of AZO

Keywords Transparent conductive oxide;Ai doped ZnO;Electrical property;Microstructure;DC magnetron sputtering;