Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(3); 2007
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2007;40(3):113-116. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.3.113

Structure and Photo-catalytic Activity of TiO2 Films Deposited by Reactive RF Magnetron Sputtering

  • Lee, Jung-Chul;Song, Pung-Keun;
    School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;
Abstract

Titanium dioxide ($TiO_2$) films were deposited by RF reactive magnetron sputtering on non-alkali glass and single crystal MgO (100) substrate at substrate temperature of $400^{circ}C$. Micro structures of $TiO_2$ films we

Keywords Titanium dioxide;Photocatalyst;Crystallinity;Reactive sputtering;