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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 40(4); 2007
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2007;40(4):159-164. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2007.40.4.159
Al2O3 Coating on Transparent Polycarbonate Substrates for the Hard-coating Application
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Plasma Surface Engineering Laboratory, School of Materials Science and Engineering, Seoul National University;Plasma Surface Engineering Laboratory, School of Materials Science and Engineering, Seoul National University;Plasma Surface Engineering Laborato
Abstract
Transparent aluminum oxide films were deposited on polycarbonate (PC) substrates by inductively coupled plasma (ICP) assisted reactive sputtering. the oxygen flow rate was regulated by controlling the target voltage with a proportional integrate derivativ
Keywords Polycorbonote;ICP;Aluminum Oxide;Hard coating;Residual stress;