Oct, 31, 2024

Vol.57 No.5

Current Issue Archives
Search
Advanced Search
Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(4); 2007
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2007;40(4):165-169. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2007.40.4.165

Characterization of Cesium Assisted Sputtering Process Using Design of Experiment

  • Min, Chul-Hong;Park, Sung-Jin;Yoon, Neung-Goo;Kim, Tae-Seon;
    School of Information, Communications and Electronics Engineering, Catholic University of Korea;SORONA Inc.;SORONA Inc.;School of Information, Communications and Electronics Engineering, Catholic University of Korea;
Abstract

Compared to conventional Indium Tin Oxide (ITO) film deposition methods, cesium (Cs) assisted sputtering offers higher film characteristics in terms of electrical, mechanical and optical properties. However, it showed highly non-linear characteristics bet

Keywords Design of Experiment[DOE];Cesium assisted sputtering;Indium tin oxide[ITO];Statistical analysis;