Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(4); 2007
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2007;40(4):185-189. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.4.185

Statistical Analysis of Characteristics of Scanning Electron Microscope

  • Kim, T.S.;Kim, W.;Kim, D.H.;Kim, B.;
    School of Information, Communications & Electronics Engineering, The Catholic University of Korea;Department of Electronic Engineering, Sejong University;School of Mechanical Design & Automation Engineering, Seoul National University of Technology;Departm
Abstract

A scanning electron microscope (SEM) is a complex system, consisting of many sophisticated components. For a systematic characterization, a $2^4$ full factorial experiment was conducted. The SEM components examined include condenser lens 1 and

Keywords SEM;Statistical analysis;Main effect;Response surface model;