Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(5); 2007
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2007;40(5):209-213. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.5.209

Plasma Characteristics and Substrate Temperature Change in Al:ZnO Pulse Sputter Deposition: Effects of Frequency

  • Yang, Won-Kyun;Joo, Jung-Hoon;
    Department of Materials Science & Engineering, Kunsan National University;Department of Materials Science & Engineering, Kunsan National University;
Abstract

Change of the plasma volume by pulse frequency in a bipolar pulsed DC unbalanced magnetron sputtering was investigated. As increasing the frequency at off duty 10% and at a constant power, the plasma volume was lengthened in vertical direction from the AZ

Keywords AZO;Bipolar pulsed DC;Plasma volume;UBM;