Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(6); 2007
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2007;40(6):245-249. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.6.245

Effects of Reactive Gas Addition on the Mechanical Property and Water Permeability of IZO Films Deposited by DC Sputtering for Application to Flexible OLED

  • Cheon, Ko-Eun;Lee, Dong-Yeop;Cho, Young-Rae;Song, Pung-Keun;
    School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineerin
Abstract

Amorphous IZO films were deposited on PET substrate by DC magnetron sputtering without substrate heating. In order to investigate effect of reactive gas addition on film properties, 0.2-0.4% of $H_2$ or $O_2$ gas was introduced durin

Keywords OLED;IZO;TCO;Bending test;Mechanical property;Water permeability;DC magnetron sputtering;