Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(6); 2007
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2007;40(6):258-261. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.6.258

Growth Characteristics of SnO2 Thin Film for Gas Sensor with Annealing Treatment

  • Kang, Kae-Myung;Choi, Jong-Un;
    Dept. of Mater. Sci. and Engineering, Seoul National University of Technology;Dept. of Mater. Sci. and Engineering, Seoul National University of Technology;
Abstract

Relationships between the electrical resistivity and the growth characteristic of $SnO_2$ thin films were investigated. $SnO_2$ thin films with thickness from 64 nm to 91 nm were made by controlling the RF deposition energy from 80 t

Keywords Tin dioxide[$SnO_2$];Annealing;Electrical resistivity;Grain size;