Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(6); 2007
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2007;40(6):279-282. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.6.279

Microstructure and Mechanical Properties of Cr-Mo-Si-C-N Coatings Deposited by a Hybrid Coating System

  • Yun, Ji-Hwan;Ahn, Sung-Kyu;Kim, Kwang-Ho;
    Division of Materials Science and Engineering, Pusan National University;National Core Research Center for Hybrid Materials Solution Materials, Pusan National University;Division of Materials Science and Engineering, Pusan National University;
Abstract

Cr-Mo-Si-C-N coatings were deposited on steel and Si wafer by a hybrid system of AIP and sputtering techniques using Cr, Mo and Si target in $Ar/N_2/CH_4$ gaseous mixture. Instrumental analyses of XRD and XPS revealed that the Cr-Mo-Si-C-N coat

Keywords Cr-Mo-Si-C-N;Hybrid system;Microstructure;Mechanical properties;