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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 41(1); 2008
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2008;41(1):6-11. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.1.006
The Comparison to Physical Properties of Large Size Indium Zinc Oxide Transparent Conductive Layer
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Samsung Electronics, Co., Ltd., LCD Business, R&D Center;Samsung Electronics, Co., Ltd., LCD Business, R&D Center;Samsung Electronics, Co., Ltd., LCD Business, TFT 3 Part(Mobile);SungKyunKwan University, School of Information & Communication Engineering,
Abstract
An Indium Zinc Oxide(IZO) transparent conductive layer was deposited on a large size glass substrate by using magnetron dc sputtering method with varying a deposition temperature. As the deposition temperature decreased to a room temperature, the sheet re
Keywords Indium Zinc Oxide;Room temperature deposition;Liquid crystal display;Large size;