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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 41(1); 2008
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2008;41(1):38-42. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.1.038
Surface Properties of Electrolytic-Polished 316L Stainless Steel Welding Tube for Semi-Conductor Fab. - As the Relation of Electrolysis Conditions with Surface Characteristics -
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Department of New Materials Eng., Chungbuk National University;Valexkorea Co. Ltd.;
Abstract
316L stainless steel welding tube was electrolytically polished and the inner surface characteristics of the tube were tested. Electro-polishing variables such as current, voltage, concentration of electrolyte and electropolishing time were changed to see
Keywords 316L stainless steel welding tube;Electro-polishing;XPS;AES;Surface roughness;Pipeline;Semiconductor production;Clean room;