Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 41(3); 2008
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2008;41(3):94-101. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2008.41.3.094

A Study of Discharge Shape Changes by Magnet Arrangements in a Magnetron Cathode

  • Jee, Jung-Eun;Joo, Jung-Hoon;
    Department of Materials Science and Engineering Plasma Materials Research Center, Kunsan National University;Department of Materials Science and Engineering Plasma Materials Research Center, Kunsan National University;
Abstract

A new convenient magnet array module is designed to investigate effects of magnetic field array on magnetron discharge characteristics. Magnetic field analysis showed good agreement of measured discharge region by a CCD device which has a high quantum eff

Keywords Magnetron;Sputtering;Magnetic field;Plasma;Pulsed dc;Melting;