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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 41(4); 2008
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2008;41(4):129-133. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.4.129
Properties of Nitrogen and Aluminum Codoped ZnO Thin Films Grown by Radio-frequency Magnetron Sputtering
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Department of Electronic Materials Engineering, Silla University;Department of Electronic Materials Engineering, Silla University;
Abstract
Nitrogen and aluminum codoped ZnO(NAZO) thin films were grown on glass substrates with changing the nitrogen flow ratio by radio-frequency magnetron sputtering. The structural, optical, and electrical properties of the NAZO films were investigated. The su
Keywords ZnO;RF magnetron sputtering;Nitrogen flow ratio;