Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 41(4); 2008
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2008;41(4):134-141. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2008.41.4.134

Characterization of a Remote Inductively Coupled Plasma System

  • Kim, Yeong-Uk;Yang, Won-Kyun;Joo, Jung-Hoon;
    Department of Materials Science and Engineering and Plasma Materials Research Center, Kunsan National University;Department of Materials Science and Engineering and Plasma Materials Research Center, Kunsan National University;Department of Materials Scien
Abstract

We have developed a numerical model for a remote ICP(inductively coupled plasma) system in 2D and 3D with gas distribution configurations and confirmed it by plasma diagnostics. The ICP source has a Cu tube antenna wound along a quartz tube driven by a va

Keywords Numerical modeling;Inductively coupled plasma;CFD-ACE;