Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 41(5); 2008
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2008;41(5):199-204. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2008.41.5.199

Performance of OLED Fabricated on the ITO Deposited by Facing Target Sputtering

  • Yoon, Chul;Kim, Sang-Ho;
    Dept. of Materials Engineering, Korea University of Technology and Education;Dept. of Materials Engineering, Korea University of Technology and Education;
Abstract

Indium tin oxide (ITO) has been commonly used as an anode for organic light emitting diode (OLED), because of its relatively high work function, high transmittance, and low resistance. The ITO was mostly deposited by capacitive type DC or RF sputtering. I

Keywords Organic light emitting diode (OLED);Facing target sputtering (FTS);Indium-tin-oxide (ITO);Surface roughness;Microstructure;