Oct, 31, 2024

Vol.57 No.5

Current Issue Archives
Search
Advanced Search
Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 41(5); 2008
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2008;41(5):205-213. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2008.41.5.205

Characterization of a Magnetron Sputtering Cathode by a 3D Particle Model

  • Joo, Jung-Hoon;
    Department of Materials Science and Engineering and Plasma Materials Research Center, Kunsan National University;
Abstract

A 3D particle code is developed to analyze electron behavior in a planar magnetron sputtering cathode either in balanced or unbalanced configuration. Three types of collisions are included; electron - neutral elastic, excitation to a metastable state and

Keywords plasma;magnetron sputtering;particle simulation;