Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 41(5); 2008
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2008;41(5):214-219. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2008.41.5.214

Effect of RF Superimposed DC Magnetron Sputtering on Electrical and Bending Resistances of ITO Films Deposited on PET at Low Temperature

  • Park, Mi-Rang;Lee, Sung-Hun;Kim, Do-Geun;Lee, Gun-Hwan;Song, Pung-Keun;
    Department of Materials Science and Engineering, Pusan National University;Surface Technology Research Center, Korea Institute of Materials Science (KIMS);Surface Technology Research Center, Korea Institute of Materials Science (KIMS);Surface Technology R
Abstract

Indium tin oxide (ITO) films were deposited on PET substrate by RF superimposed DC magnetron sputtering using ITO (doped with 10 wt% $SnO_2$) target. Substrate temperature was maintained below $750^{circ}C$ without intentionally subs

Keywords Indium Tin Oxide (ITO);RF super-imposed DC sputtering;Magnetron sputtering;Flexible substrate;Bending test;