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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 41(6); 2008
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2008;41(6):274-278. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.6.274
Heat Transfer Analysis of a Pulse Magnetron Sputtering Cathode
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Department of Materials Science and Engineering and Plasma Materials Research Center, Kunsan National University;
Abstract
3-dimensional numerical analysis for a rectangular magnetron cathode model is done to predict cooling characteristics of high power sputtering system for ZnO deposition. It includes cooling channel design, heat transfer analysis of a target, bonding layer
Keywords Plasma;Magnetron sputtering;Heat transfer;Numerical analysis;